E01700 - SEMI E17 - Guide for Mass Flow Controller Transient Characteristics Tests StdTpc-Equipment Models The model specified in this

The model specified in this Specification is used in conjunction with the Sensor/Actuator Network Common Device Model (CDM) to completely describe the VPG as it appears from the network interface

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NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met

as when pulled down onto an ideally clean flat chuck

E01700 - SEMI E17 - Guide for Mass Flow Controller Transient Characteristics Tests StdTpc-Equipment Models The model specified in this1 Purpose 1. 1 The purpose of this Standard is to provide a test method for measurement of mass flow controller (MFC) transient characteristics. 2 Scope 2. 1 This Standard is intended to establish a common basis for communication between users and suppliers of semiconductor equipment. It provides terminology and methodology aimed at eliminating confusion regarding what previously has been referred to as MFC response time. The conditions and procedures