E00100 - SEMI E1 - Specification for Open Plastic and Metal Wafer Carriers Revision:SEMI E1-1110 (Reapproved 0816) - Inactive

E00100 - SEMI E1 - Specification for Open Plastic and Metal Wafer Carriers Revision:SEMI E1-1110 (Reapproved 0816) - InactiveNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification provides the dimensional requirements for plastic and metal wafer carriers used for the processing and handling of 3 in., 100 mm, 125 mm, and 150 mm diameter wafers. It also includes some related

• Carrier scheduling

2 — Guide for the Qualification of Polymer Assemblies Used for Liquid Chemical Systems in Semiconductor Equipment

org in February 2009

The end user will be able to use these test methods to verify compliance with a facility design specification after the facility is built or after design changes have been made

Viewing distance ranges from 0

Referenced SEMI StandardsSEMI M1 — Specifications for Polished Single Crystal Silicon Wafers

This Standard is designed to be updated as EQIPs are identified for new and/or existing equipment process types in this Standard

Format: Online data access compatible with IOS

SEMI E88-0301 (technical revision)

SEMI E77-1104 (Reapproved 0710)

This Standard establishes a Specific Equipment Model (SEM) for Metrology equipment (MSEM)

SI units are the reference units for this Guide