D05900 - SEMI D59 - Terminology for 3D Display Revision:SEMI D59-0519 - Superseded

D05900 - SEMI D59 - Terminology for 3D Display Revision:SEMI D59-0519 - Superseded1 Purpose 1. 1 This Standard is written to provide better communication between parties in the supply chain, as well as between resale and consumers. 2 Scope 2. 1 This Standard starts with the basic and most necessary terms which are used in 3D display (especially for those different from 2D displays). Establishment of other related terminologies will follow. Referenced SEMI Standards (purchase separately) None. Revision History SEMI D59 0710

SEMI E143-0306 (Reapproved 0512)

本仕様が意図しているものは，電子材料グレード単結晶シリコンインゴット成長のために用いられる多結晶シリコンの調達に使用することである。そのようなインゴットは，ウェーハに切断され，その後，半導体デバイス，集積回路，マイクロエレクトロメカニカルシステム（MEMS）を含む他のマイクロエレクトロニック部品の製造に使用される。

1 (applicable for systems designed to handle 300 mm wafer carriers)

Crystalline sapphire wafers (CSW) are used as substrates for manufacturing compound semiconductor devices

or are looking for company-wide access

Appropriate information is summarized in § 5

Hydrogen chloride is a colorless

1-0921 (technical revision)

SEMI E90 — Specification for Substrate Tracking

orgで入手可能となる。初版は1989年発行，前版は2003年1１月発行。

This places a burden on the capabilities of transport modules to move wafers to and from various process modules in a cluster tool

It specifically clarifies the load in the test method and evaluation items in the evaluation method