M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers Revision:SEMI M38-0312 - Superseded The minimum test described in

The minimum test described in this Standard is to test one MFC in five common mounting positions using Nitrogen gas at 135

and two classes of larger diameter test wafers (from 150 mm)

called the SECS Equipment Data Dictionary (SEDD)

1-0698 (first published)

Secondary ion mass spectrometry (SIMS) can measure on polished silicon wafer product the following:

M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers Revision:SEMI M38-0312 - Superseded The minimum test described inThis Specification divides reclaimed wafers into four application categories: Mechanical, Furnace, Particle, and Lithography and provides tables of the specification requirements for each category. Thus, a prospective purchaser of reclaimed silicon wafers needs to know which application matches his or her requirements. Only requirements for some attributes are specified in Tables 1 and 2. Other requirements are indicated to be customer specified which